Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection
نویسندگان
چکیده
The diaphragm fiber optic sensor (DFOS) solely based on Fabry-Perot multiple beam interference has been designed and fabricated with Micro-electric mechanical system (MEMS) technology. The silicon diaphragm with an embossed center was designed with an interference gap width kept accurately. The DFOS is verified to be truly and purely of Fabry-Perot type via a critical test. Parallel testing of DFOS in comparison with a Piezoelectric (PZT) sensor shows that DFOS has high sensitivity. Fabry-Perot DFOS has demonstrated excellent performances in on-line monitoring of Partial Discharge (PD) in power transformers.
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تاریخ انتشار 2007